セラミック貫通真空パック電極

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Ceramic feedthrough vacuum pack electrodes for Semiconductor vacuum equipment

空気圧式ロータリーバルブ式セラミック計量ポンプ power feedthrough with CF type vacuum flanged fitting. It is a electrical feedthrough and conveys high-voltage, high-amperage power into high-vacuum environments for operating heating coils in sputtering, coating and other demanding material evaporation applications or experiments.

Feedthroughs (or vacuum feedthroughs) come in many forms to transfer electrical currents, signals, fluids, gases or mechanical movements from outside the vacuum (air side) to the inside (vacuum side) of a vacuum chamber to equipment within the chamber. The entry point for the feedthrough must be vacuum-sealed via a suitable through hole. The feedthrough can be weldable (weld-on) or connected with a CF, KF or ISO vacuum flange to the vacuum chamber.

 

特徴

1) 材料:≥95% alumina
2) Made by processing after fining
3) With good performance such as thermal shock resistance, metalized strength
4) Used as ceramic switch tube of electrical vacuum in high voltage and highfrequency electrical tubes with big power.

ceramic feedthrough vacuum pack electrodes

製品説明

Major components

95% 96%.99 アル23

密度

g / cm3

3.6

Material properties

アルミナセラミックネジ

%

Sintering temperature

°C

1600-1800

Physical properties

硬度

CNCによる生産能力

1500

曲げ強度

Kgf/cm2

3000

CNCによる生産能力

Kgf/cm2

25000

CNCによる生産能力

Map.m3/2

3-4

Maximum temperature

°C

1800

Thermal properties

熱膨張係数

/°C

8*10-6

Heat shock

CNCによる生産能力(°C)

220

熱伝導率

W / m.k(25-300°C)

25 14

20°C

>1012

CNCによる生産能力

100°C

>.アルミナセラミックネジ

1012-1013

電気的特性

300°C

>1010

絶縁破壊強度

CNCによる生産能力

18

dielectric constant

100MHz(CNCによる生産能力)

9.5

セラミック_ヒートシンク_基板_:
Feed-through insulatorsPower switches
Insulating discsTraveling wave tubes
Insulator rings and cylindersVacuum interrupters
HeadersWindows
High-power receptaclesPower grid tubes
Precipitator productsX線管

 

接合タイプ:
セラミック + Mo/Mn メタライズド + ニッケルめっき
セラミック + Mo/Mn メタライズド + 銀メッキ
セラミック + Mo/Mn メタライズド + 金メッキ
セラミック + 銀の印刷
* お客様の図面やサンプルに応じて特殊タイプも対応可能です.

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