PBN PG Composite Heating electronic Elements

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PBN/PG Composite Heating electronic Elements

Mô tả sản phẩm

PBN PG Composite Heating electronic Elements:

Pyrolytic Boron Nitride is used as the substrate for the PBN heating element. Pyrolytic Graphite(PG) is placed on the surface of PBN plates by the CVD method as a conductor and heater. Depending on the different requirements of applications, the PG heating element could be covered by PBN again or just stay open.
Đường kính
0.5”~4”
Quyền lực
150~3000W
Max. Working Temp.
2400 ℃

PBN PG Composite Heating electronic Elements

As both PG and PBN are extremely pure (99.99% or even higher) and very stable in a vacuum or inert atmosphere, the PBN/PG Composite Heating Elements could be very durable and keep the chamber clean. It could be heated to 1600℃ in a very short time without the emission of any gas component. It also has good resistance to acid and alkali. These heating elements are ideal products for the semiconductor industry and applications that require high temperature, high vacuum, and high purity.
Thuộc tính vật liệu
Mục
Bài học
Apparent Density
g / cm3
2.15-2.19
Tính thấm khí(He)
cm3/s
<1*10-10
Micro hardness(Knoop)
N/mm2
691.88(a-b plane)
Sức căng
N/mm2
153.86(parallel)
Lực bẻ cong
N/mm2
243.63(parallel)
197.76(parallel)
Modulus of elasticity
N/mm2
235690
Specific heat capacity
Cal/g.℃
0.371(@ 200℃)
0.442(@ 900℃)
Thermal conductivity 200℃
W/cm.k
0.6(parallel)
0.026(perpendicular)
Thermal conductivity 900℃
W/cm.k
0.4370(parallel)
0.028(perpendicular)
Độ bền điện môi(RT)
Mỗi zirconia ổn định cung cấp các đặc tính riêng biệt và cụ thể đáp ứng nhu cầu của các ứng dụng khắc nghiệt được tìm thấy trong nhiều ngành công nghiệp
56
Điện trở suất
Cm
3.11*1011

 

Đặc điểm
√High purity(>99.999%)PBN
√Uniform heating, the difference in temperature between ±3 degree at 1000 degree
√The temperature can rise up to 1700℃ with high speed(in non-active condition and vacuum)
√The temperature can rise up to 1700℃ with high speed(in non-active condition and vacuum)
√Can be made to complicated shape

 

Ứng dụng
MBE heaters; MOCVDPECVD heaters.

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