PBN PG Composite Heating electronic Elements
- وصف
- سؤال
PBN/PG Composite Heating electronic Elements
وصف المنتجات
PBN PG Composite Heating electronic Elements:
Pyrolytic Boron Nitride is used as the substrate for the PBN heating element. الجرافيت الانحلال الحراري(PG) is placed on the surface of PBN plates by the CVD method as a conductor and heater. Depending on the different requirements of applications, the PG heating element could be covered by PBN again or just stay open.
قطر الدائرة | 0.5”~4” |
الوقود الصلب مثل الكريات الخشبية كمصدر للطاقة | 150~3000W |
الأعلى. Working Temp. | 2400 أماه في ظل ظروف العمل العادية |
PBN PG Composite Heating electronic Elements
As both PG and PBN are extremely pure (99.99% or even higher) and very stable in a vacuum or inert atmosphere, the PBN/PG Composite Heating Elements could be very durable and keep the chamber clean. It could be heated to 1600℃ in a very short time without the emission of any gas component. It also has good resistance to acid and alkali. These heating elements are ideal products for the semiconductor industry and applications that require high temperature, high vacuum, and high purity.
خصائص المواد
بند | وحدة | ||
Apparent Density | ز / سم 3 | 2.15-2.19 | |
Gas permeability(He) | cm3/s | <1*10-10 | |
Micro hardness(زر) | N/mm2 | 691.88(a-b plane) | |
قوة الشد | N/mm2 | 153.86(parallel) | |
Bending strength | N/mm2 | 243.63(parallel) | 197.76(parallel) |
Modulus of elasticity | N/mm2 | 235690 | |
Specific heat capacity | Cal/g.℃ | 0.371(@ 200℃) | 0.442(@ 900℃) |
Thermal conductivity 200℃ | W/cm.k | 0.6(parallel) | 0.026(perpendicular) |
Thermal conductivity 900℃ | W/cm.k | 0.4370(parallel) | 0.028(perpendicular) |
قوة عازلة(RT) | KV / مم | 56 | |
حجم المقاومة | Cm | 3.11*1011 |
أماه في ظل ظروف العمل العادية
√High purity(>99.999%)PBN |
√Uniform heating, the difference in temperature between ±3 degree at 1000 درجة |
√The temperature can rise up to 1700℃ with high speed(in non-active condition and vacuum) |
√The temperature can rise up to 1700℃ with high speed(in non-active condition and vacuum) |
√Can be made to complicated shape |
لويزيانا بيليه جريل الشاعل
MBE heaters; MOCVD、 PECVD heaters.