Alumina Semiconductor Ceramic Wafer Loader Arm

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Alumina Semiconductor Ceramic Wafer Loader Arm (4)_1
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Alumina Semiconductor Ceramic Wafer Loader Arm (4)_1
Alumina Semiconductor Ceramic Wafer Loader Arm (1)_1

Alumina Semiconductor Ceramic Wafer Loader Arm

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99.8% Alumina Semiconductor Ceramic Wafer Loader Arm

The main features of the semiconductor ceramic wafer loader arm
1. High precision dimensions with tightening tolerance, it’s easier to get a perfect fitting relation
2. High-temperature ability: withstand up to 1650°C in oxidizing and reducing atmospheres
3. Wear & abrasion resistance: Alumina is extreme hard technical ceramic with superb wear resistance
4. Chemical inertness, resistant most of the strong acid and alkali, and does not rust forever 
5. Electrical insulation: The insulation breakdown is up to 18KV at least
6. Great mechanical properties, hardness, compressive and flexural strength are much higher stainless steel
7. Chemical corrosion resistance under high temperature, even if with strong acid or alkali
8. Protective atmospheres or high vacuum at high-temperature to eliminate contamination or impurity.
9. Low material cost in high-level applications than other technical ceramics

The specification of ceramic parts

Material optionAlumina(Al2O3), Zirconia (ZrO2), Silicon carbide(SiO2), Silicon nitride(Si3N4)
Forming methodsISO pressed, Dry pressed, Ceramic injection molding, Hot pressed
SpecificationOD can be from 1 to 50mm, length can be from 10mm to 800mm
Precision processingCNC machining, Precision grinding, Polishing, Lapping,
ToleranceThe tolerance of OD and ID can be 0.001mm,  the tolerance of length can be 0.001mm
Key parametersRoughness to be 0.02mm, Flatness to be 0.001mm, Parallelism to be 0.001mm
Surface qualityFree of cracks, foreign contamination, mirror surface better than Ra0.1

Alumina Semiconductor Ceramic Wafer Loader Arm
The description of high precision alumina ceramic wafer loader arm
For semiconductor devices, the critical process, as well as the parts which need to be used in a vacuum, high temperature, and corrosive gas environment, also require a clean and dustless environment. However, precision ceramic material could maintain high stability in a complicated physical and chemical environment. Semiconductor ceramic part we produced with wear resistance, corrosion resistance, low thermal expansion, insulation is made from 99.8% alumina ceramic and formed by cold isostatic pressing, high-temperature sintering, and precision machining, that’s why can meet the stringent requirements of parts for semiconductor equipment.

Alumina Semiconductor Ceramic Wafer Loader Arm

Remark:

We have the capability with a variety of complicated geometry of high precision ceramic parts via CNC machining, precision grinding, precision drilling, and so on.

Datasheet of Technical ceramics

PropertyUnits Material
99.5%
alumina		99%
alumina		95%
alumina		ZrO2
(Y-TZP)		ZrO2
(TTZ)
Densityg/cm3≥3.85≥3.80≥3.60≥5.95≥5.72
Water absorption%00000
HardnessHV1700170015001300900
Flexural strengthMpa≥379≥338≥320≥1200≥1200
Compressive strengthMpa≥2240≥2240≥2000≥19901750
Fracture toughnessMpa m1/24-54-53-46.5-811
Max. service
temperature		ºC1675160014501000
CTE1×10 -6 /ºC6.5~8.06.2~8.05.0~8.08.0~9.510.2
Thermal shockT(ºC)≥250≥200≥220≥300350
Thermal conductivity(25ºC)W/m.k30292433
Volume resistivityohm.cm
25ºC>1 x 10 14>1 x 10 14>1 x 10 14>1 x 10 11>1 x 10 11
300ºC1 x 10 128 x 10 1110 12 -10 131 x 10 101 x 10 10
500ºC5 x 10 102 x 10 91 x 10 91 x 10 61 x 10 6
Insulation strengthKV/mm1918181720
Dielectric constant(1Mhz)(E)9.79.59.52928

 

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